液相外延法制备β-BBO薄膜  

Fabrication of β-BBO thin films by liquid phase epitaxy technique

作　　者：刘军芳[1] 徐军[2] 姚武[1] 

机构地区：[1]同济大学材料科学与工程学院,上海200092 [2]中国科学院上海光学精密机械研究所,上海201800

出　　处：《材料研究学报》2007年第4期444-448,共5页Chinese Journal of Materials Research

基　　金：同济大学青年优秀人才培养行动计划资助.~~

摘　　要：采用液相外延法在掺Sr^(2+)的α-BBO(001)村底上制备了β-BBO薄膜,研究了制备条件对薄膜质量的影响.结果表明:当生长温度为810℃时,转速为300r/min生长的外延膜具有较高的结晶质量,且随着生长时间的延长,外延膜的结晶质量有所提高.β-BBO薄膜呈c轴高度择优取向,薄膜的双晶摇摆曲线半峰宽值FWHM仅为676.6″,表明β-BBO薄膜较好的结晶质量;在不具备相位匹配的条件下,β-BBO外延膜也能够实现二次谐波输出.Beta-BBO thin films have been grown by liquid phase epitaxy on Sr^2＋-doped alpha- BBO substrates. Compositional uniformity is dependent at least on maintainity a steady growth rate, the variables having the greatest effect on the latter, i. e. growth temperature, rotation rate, dip time. The effects of growth conditions on the quality of film were investigated. As a growth temperature of 810 ℃ and rotation rate of 300 r/min, thin films are found to be highly crystallined. Meanwhile, the crystallinity of the film improves with the increasing of dip time. The grown films are highly （001）-oriented. The full width at half-maximum （FWHM） of the rocking curve for the film is as low as 676.6＇＇, which means the high crystallinity of the thin film. The films exhibit second harmonic generation even the phase match condition is not satisfied.

关 键 词：无机非金属材料 液相外延 β-BB0薄膜 

分 类 号：TB321[一般工业技术—材料科学与工程]