一种新型叉指式共面波导的设计与制作  

Design and Fabrication of a New Micromachined Interdigital Coplanar Waveguide

作　　者：孙晓峰[1] 丁桂甫[1] 顾东华[1] 黎滨洪[1] 沈民谊[1] 

机构地区：[1]上海交通大学微纳科学技术研究院薄膜与微细加工教育部重点实验室,上海200030

出　　处：《微波学报》2007年第4期43-46,共4页Journal of Microwaves

基　　金：国防基础科研项目(A1420060154)

摘　　要：设计制作了一种新型叉指式共面波导传输线并对其性能进行了初步的研究。通过微加工技术加厚的接地线可以减少传输线平行部分之间的相互干扰，仿真和测试表明在5～20GHz范围内其回波损耗有两个极小值，极小值的位置随传输线结构参数的变化而变化。以-20dB为基准，这两个极小值附近的带宽可以达到1．95GHz，相对带宽分别可以达到23．5％和9．97％，相应的插入损耗在0．33dB／cm和0．5dB／cm左右。这种传输线有助于减小器件整体尺寸，在带通滤波器和移相器的设计方面有重要用途。In this paper, a new micromachined interdigital coplanar waveguide （CPW） structure has been developed and the transmission line parameters have been studied. For this interdigital CPW, the ground conductor is thickened by micromachining techniques which is helpful for reducing the interference between the adjacent parallel center conductors. Within the frequency range from 5 to 20GHz, the return loss of this structure has two minimal values whose positions change with the structural parameters. The relative bandwidths reached 23.5% and 9.97% at 8.3GHz and 16.55GHz respectively. The insertion losses are about 0.33dB/cm and 0.5dB/cm respectively. The interdigital CPW is useful for designing bandpass filter and phase shifter and minimizing the size of microelectromechanical system （MEMS） devices.

关 键 词：共面波导 叉指式共面波导 微加工技术 传输线 

分 类 号：TN61[电子电信—电路与系统]