层数对MMIC差分对称圆形螺旋电感的性能影响  

Influence of MMIC Differential Symmetric Circular Spiral Inductor's Geometric Layers on Circuit Performances

作　　者：肖华清[1] 熊祥正[1] 廖成[1] 

机构地区：[1]西南交通大学电磁场与微波技术研究所,成都610031

出　　处：《微电子学》2007年第4期507-510,共4页Microelectronics

基　　金：国家自然科学基金资助项目(60441006)

摘　　要：采用基于有限元数值求解Maxwell方程的通用全波电磁(EM)场仿真器HFSS(HighFrequency Structure Simulator),结合硅衬底螺旋电感(SIOS)的紧凑集总模型,对差分对称圆形单层双层螺旋电感进行了对比研究。结果表明,前者在品质因数(QF)、自谐振频率(SRF)和3 dB带宽(BW)方面明显优于后者,而且前者最大品质因数处的电感值也符合nH量级要求。采用文中参数,前者较后者QF提高56.5%,SRF提高196.8%,BW提高5倍以上,但后者的电感值能达到前者3倍以上。模拟结果与理论分析相吻合。Based on Ansoft＇s 3D electromagnetic field software HFSS and typical lumped equivalent-circuit model of spiral inductors on silicon （SIOS） for RF integrated circuit （RFIC）, a comparison study was made on single and double-layered differential symmetric circular spiral inductors. The numerical analysis demonstrated that the former could result in better quality factor （QF） and self-resonant frequency （SRF） and the L value of the former can satisfy nil-level requirements, where the Q factor achieves its highest value. Experimental results showed that the former gave a 56. 5% increase for the maximum Q value and 196. 8% increase for the SRF, whereas the latter can supply over 3 times larger L value. Simulation results were in good agreements with theoretical analysis. Finally, design guidelines were provided based on both simulation and experimental results.

关 键 词：差分对称 MMIC 螺旋电感 品质因数 自谐振频率 

分 类 号：TN385[电子电信—物理电子学]