小型非球面光学元件测量技术研究  

Research on the Measurement of Small Optical Element with Aspheric Surface

作　　者：王美成[1] 廖广兰[1] 史铁林[1] 

机构地区：[1]华中科技大学机械科学与工程学院,湖北武汉430074

出　　处：《计测技术》2007年第4期1-4,13,共5页Metrology & Measurement Technology

基　　金：国家重大基础研究项目(2003CB716207);国家自然科学基金资助项目(50405033);日本三丰科学技术振兴协会资助项目

摘　　要：非球面光学元件应用越来越广泛,其测量技术非常关键。本文研究了小型非球面光学元件的各种面形测量方法,针对其测量原理进行了分类和对比,对其优缺点和适用范围进行了讨论,同时分析了各种测量方法实现的关键技术和面临的挑战。The optical elements with aspheric surface are widely applied now in many fields, where the measurement of aspheric surface plays a critical role. The measuring methods for small aspheric optical elements are introduced in this paper. Then according to the measuring principle the methods are classified and compared. The advantages, disadvantages and application scope of the methods are also discussed. Finally, the critical problems and facing challenges in realization of these methods are analyzed.

关 键 词：非球面 光学元件 接触测量 非接触测量 

分 类 号：TB9[一般工业技术—计量学] TH74[机械工程—测试计量技术及仪器]