硅微机械谐振式压力传感器组合敏感原理  

Combined Sensing Principle of Si MEMS Resonant Pressure Sensor

作　　者：邢维巍[1] 樊尚春[1] 

机构地区：[1]北京航空航天大学仪器科学与光电工程学院,北京100083

出　　处：《微纳电子技术》2007年第7期20-21,24,共3页Micronanoelectronic Technology

摘　　要：为解决硅微机械谐振式压力传感器的微弱信号检测问题,并改善其可靠性和动态响应,提出在传感器原有结构上增加辅助传感器,构成组合敏感原理。利用根据辅助传感器测量结果推算出的谐振频率近似值,可控制带通滤波器的中心频率以改善噪声抑制;可及时判断闭环系统失效;可在闭环系统失效状态下继续部分维持传感器的测量功能。辅助传感器的制造工艺与主传感器兼容,附加成本低。To solve the weak signal detecting problem in MEMS resonant pressure sensor, and improve its reliability and dynamic response, a combined sensing principle that appends an assistant sensor to former sensor structure was presented. With the approximate resonant frequency calculated from assistant sensor＇s measurement result, central frequency of BPF was controlled to improve noise reduction, failure state of the closed-loop system was judged in time, the measurement function of the sensor was partially kept under the condition that the closed-loop system really failed. Manufacture technology of assistant sensor was compatible with that of main sensor, and the extra cost was quite low.

关 键 词：谐振式传感器 微机电系统 闭环系统 组合敏感原理 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]