乙醇化学气相沉积法制备多壁碳纳米管  

Growth of Multi-Walled Carbon Nanotubes by ECCVD

作　　者：程进[1] 邹小平[1] 李飞[1] 张红丹[1] 任鹏飞[1] 朱光[1] 王茂发[1] 

机构地区：[1]北京信息工程学院传感技术研究中心

出　　处：《微纳电子技术》2007年第7期111-112,116,共3页Micronanoelectronic Technology

基　　金：北京市教委人才强教计划中青年骨干教师培养项目和学术创新团队项目(新型传感器及敏感材料;2005~2007);北京市留学归国人员科技活动择优资助项目;北京市传感器重点实验室开放课题(66062021)

摘　　要：介绍了采用浮动催化剂法,利用乙醇化学气相沉积法制备多壁碳纳米管。采用二茂铁作为催化剂先体,乙醇作为碳源,利用石英基底收集产物。催化剂先体二茂铁的蒸汽在载气的作用下被带到高温区(800℃),二茂铁在高温区分解形成铁纳米催化剂颗粒,这些催化剂颗粒催化生长出多壁碳纳米管。利用扫描电子显微镜、(高分辨)透射电子显微镜对制备的多壁碳纳米管都进行了表征。实验结果表明,制备的多壁碳纳米管均匀性好,石墨化程度较高。Synthesis of multi-walled carbon nanotubes （MWCNTs） by floating catalysts with ethanol chemical vapor deposition （ECVD） was presented, In order to prepare MWCNTs, ferrocene was employed as catalyst precursor, ethanol as carbon source materials. Quartz plates were employed to collect deposits. Catalyst precursor ferrocene gas was introduced into high temperature （800 ℃） region by carrier gas. Ferrocene was decomposed to form iron nano-particles as catalysts. These catalysts catalyzed the growth of carbon nanotubes which were deposited on substrates and the wall of furnace tube. The deposits were characterized by SEM and TEM （HRTEM）. The experiment results reveal that the MWCNTs have a good graphitization and uniformity.

关 键 词：乙醇 化学气相沉积 多壁碳纳米管 

分 类 号：TB383[一般工业技术—材料科学与工程]