二维MEMS风速风向传感器的设计与测试  

Design and Test of 2-D MEMS Wind Speed and Direction Sensor

作　　者：沈广平[1] 吴剑[1] 张骅[1] 秦明[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《微纳电子技术》2007年第7期285-287,共3页Micronanoelectronic Technology

摘　　要：给出一种基于MEMS工艺的二维风速风向传感器的设计、制造以及测试结果。该传感器加热电阻采用圆形结构,四个测温电阻对称分布在芯片四周。传感器芯片在玻璃衬底上采用两步MEMS剥离工艺加工,加工工艺简单可靠。该传感器采用恒功率工作方式,利用热温差原理测量风速和风向。经过风洞测试,传感器可以完成360°风向检测,误差不超过10°。The design, fabrication and test result of 2-D MEMS wind speed and direction were presented. A circular structure heater resistor was proposed, and four detector resistors were located symmetrically around the chip. The sensor was fabricated on ceramic substrate, using two step MEMS lift-off processes. The wind speed and wind direction were measured from the temperature differences between detectors in constant power mode. Wind tunnel measurements were carried out. The sensor can detect airflow of any direction, with an error of 10 ℃.

关 键 词：二维风速传感器 风向传感器 剥离工艺 热温差原理 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]