小型共面接口压差传感器  

Miniature Co-Plane Differential-Pressure Sensor

作　　者：金琦[1] 李长春[1] 杨勇[1] 刘宏伟[1] 孙克[1] 

机构地区：[1]沈阳仪表科学研究院,沈阳110043

出　　处：《微纳电子技术》2007年第7期301-303,共3页Micronanoelectronic Technology

摘　　要：小型共面接口压差传感器是一种压力传感器，该传感器主要用于测量和控制两个油路压力差。该产品采用SOI硅晶圆材料制作硅压阻式压力敏感芯片，敏感元件的工作温度范围为-55-300℃，通过双芯体结构将油路的压力差信号转换成电信号，再利用精密的信号处理电路，将微弱的电信号进行放大处理，实现标准的模拟信号输出。The miniature co-plane differential-pressure sensor is a kind of pressure servsor the sensor is mainly used for surveying and controlling pressure differences of the two oil ducts. SOI Si crystal material was used for manufacturing Si piezoresistive pressure sensitive chip in this product, the sensitive unit operating temperatures rang was -55 - 300℃, and it transformed the oil duct pressure difference signal into electrical signal through the twin core body structure, and it used the precise signal processing electric circuit to amplify and deal with the weak electrical signal for the realization of standard simulated signal output.

关 键 词：传感器 SOI 压差 信号处理 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]