一种微悬臂梁疲劳特性的检测方法(英文)  

A Method to Measure the Fatigue Property of a Micro-Cantilever Beam

作　　者：余存江[1] 唐洁影[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2007年第9期2139-2142,共4页Chinese Journal of Sensors and Actuators

基　　金：电子元器件可靠性物理及其应用技术国家级重点实验室项目资助(51433030105JW0601)

摘　　要：关于MEMS结构疲劳特性的研究报道中,典型的研究疲劳的方法是基于观测裂纹的产生和扩展的,如一种扇型梳壮驱动器用来产生循环的拉压作用,以此可以观察Si梁结构的裂纹的扩展情况.该方法采用渐变参量的方法来描述疲劳现象,如参量平均杨氏模量E,而且提出了一种利用检测电容来达到疲劳特性描述的测试结构.该电容和由于作用力让梁产生的位移之间有关.通过检测到的电容值,计算平均杨氏模量E以此来反映这种简单的MEMS结构的疲劳特性,最后,这种方法通过ANSYS进行验证.Many results on the fatigue properties of a MEMS structure have been reported, among which the typical approaches were based on and developed from the principles of detecting the flaws and their propagations, such as using a fan shape comb - drivers to yield cyclic compression and tension, and then, to observe the flaw propagation in a Si beam structure. This paper aims at describing the fatigue phenomenon by using the gradually variable parameters i. e. , mean E method, and then, proposing a test structure, through measuring capacitance to describe the fatigue property. This capacitance has a close relation to the displacement induced by the force applied on. The mean Young＇s modulus E is calculated according to the measured capacitance to reflect the fatigue property of the simple MEMS structure. At the end of this article, this method is verified by ANSYS.

关 键 词：MEMS可靠性 疲劳 悬臂梁 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]