全机械扫描强流离子注入机重复性研究  

STUDY ON REPRODUCIBILITY OF HIGH CURRENT ION IMPLANTER WITH FULL MECHANICAL SCAN

作　　者：陈林[1] 杨建生[1] 颜享迪 

机构地区：[1]电子工业部第48研究所,长沙410111

出　　处：《微细加工技术》1997年第1期26-30,共5页Microfabrication Technology

摘　　要：对影响全机械扫描强流离子注入机剂量重复性的因素进行了分析。对束流纹波的影响建立了数学模型，计算了束流纹波对剂量重复性的影响。结果表明只要束流纹波在9％以内，剂量重复性可控制在1％以下。The factors affecting on the reproducibility of high current ion implonterwith full mechnical scan are discussed. Especially,a mathematic model about theeffect of beam current ripple is founel to calculate the effect of beam current rip-ple on dose reproducibility. The result of calculation indicates that if ripple factorof beam current is kept within 9%,the reproducibility can be controlled 1 %.

关 键 词：强流离子注入机 全机械扫描 剂量重复性 

分 类 号：TN305.3[电子电信—物理电子学]