含重氮萘醌化合物翻转成像体系的研究概述  

The Progress of Image Reversal Components Composing Napthoquinone Diazide Compounds

作　　者：余尚先[1] 杨金瑞[1] 顾江楠[1] 

机构地区：[1]北京师范大学应用化学研究所,北京100875

出　　处：《感光科学与光化学》2007年第5期387-395,共9页Photographic Science and Photochemistry

摘　　要：本文对含重氮萘醌化合物的翻转成像体系作了详细的总结.所述翻转成像体系主要分为三类,其一主要是通过脱羧反应、酯化反应、酰胺化反应等化学反应生成碱难溶性化合物,使原本通过曝光、显影可获得的阳图图像翻转成负像;其二是以重氮萘醌化合物为产酸剂,通过酸的催化作用使交联剂与成膜树脂发生交联反应,或发生脱保护基的反应,实现翻转成像;还有一类是利用近紫外光和高能射线相结合实现翻转成像.第一类和第三类翻转成像体系在抗蚀剂方面可能有较大的应用价值,而第二类翻转成像体系可能在印刷版材方面有一定的应用前景.The article presented the progress of image reversal components composing napthoquinone diazide compounds. The title image reversal components can be classified into three categories. The mechanism of first category is mainly based on decarboxylation, esterification and/or imide reaction; and that of the second is because of crosslinking reaction of binder resin and crosslinker or deblocking reaction in the presence of an acid which was produced by napthoquinone diazide compounds. The third category can be image reversed by near-UV and high energy exposure. The first and third image reversal eornponents can be applied to photoresist and the ,second can be applied to Drinting Plate possibly.

关 键 词：重氮萘醌化合物 翻转成像 抗蚀剂 印刷版材 

分 类 号：TQ571[化学工程—精细化工]