单芯片加速度计陀螺仪结构设计与分析  

Structural Design and Analysis of a Single Chip Accelerometer Gyroscope

作　　者：石云波[1] 马宗敏[1] 刘俊[1] 

机构地区：[1]电子测试技术国家重点实验室仪器科学与动态测试教育部重点实验室中北大学,太原030051

出　　处：《半导体技术》2007年第10期913-917,共5页Semiconductor Technology

基　　金：新世纪优秀人才支持计划(NCET-04-0259)

摘　　要：提出了一种单质量块单轴集成加速度计陀螺仪(AG)结构,并利用力学、电磁学等原理对该结构进行了结构的设计与分析;同时运用计算机辅助软件对其进行了建模和仿真;依据所提指标,确定了加速度计陀螺仪各项尺寸。借助原理和仿真分析可以知道,该加速度计陀螺仪(AG)单轴敏感同一方向线加速度和角速度,结构简单、合理,在现有加工水平下实现了可加工性;该结构驱动方向和线速度和角速度检测方向相互交叉耦小,同时简化了后续处理电路。研究结果为加速度计陀螺仪的进一步研究提供了依据。　A single chip integration accelerometer gyroscope（AG） was designed,and was analyzed by mechanics and electromagnetics etc.The model of the AG was established and simulated using some softwares,and the dimensions of the AG was also confirmed based on the correlative index.It can be seen that the proposed sensor can detect the acceleration and angle velocity at the same time in the same direction through simulation and principle.The structure of AG is logical,brief and its machinability is realized on the basis of vested process.Besides,the cross coupling of the driving and the detected direction are minimized and subsequent circuits of the sensor is simple.The result guides the further research of the AG.

关 键 词：单片集成 加速度计陀螺仪 结构设计 仿真 

分 类 号：TP212.9[自动化与计算机技术—检测技术与自动化装置]