多孔硅吸收光谱和反射光谱  

Optical absorption and reflection spectra of porous silicon

作　　者：徐伟弘[1] 晁战云[1] 汪开源[1] 

机构地区：[1]东南大学

出　　处：《半导体光电》1997年第2期101-105,共5页Semiconductor Optoelectronics

摘　　要：测定了多孔硅的吸收光谱和反射光谱，结果发现其吸收边对应于可见光区域。同单晶硅相比，其吸收边发生了蓝移，并且吸收强烈。由多孔硅反射谱曲线。Optical absorption and reflection spectra of porous silicon (PS) are measured and analyzed,the result shows that the absorption edge of PS corresponds to the visible region.Compared with crystal silicon,porous silicon has a stronger optical absorption and blue shift has taken place at its absorption edge.Simple calculation and analysis of the optical constants of PS are made from the optical reflection spectrum curve by means of Kramers-Kroning relation.

关 键 词：多孔硅 特性测试 吸收光谱 反射光谱 

分 类 号：TN304.12[电子电信—物理电子学] O433.51[机械工程—光学工程]