Mg预处理蓝宝石衬底法制备的Zn极性ZnO外延薄膜的结构研究(英文)  

Structural characterization of Zn-polar ZnO films grown on Mg-modified α-Al_2O_3(0001) surface

作　　者：王勇[1] 袁洪涛[1] 杜小龙[1] 梅增霞[1] 曾兆权[1] 邹进 贾金峰[3] 薛其坤[1] 张泽[4] 

机构地区：[1]北京凝聚态物理国家实验室中国科学院物理研究所,北京100080 [2]School of Engineering and Centre for Microscopy and Microanalysis,The University of Queensland,St Lucia QLD 4072,Australia [3]清华大学物理系,北京100084 [4]北京工业大学固体微结构与性能研究所,北京100022

出　　处：《电子显微学报》2007年第5期405-410,共6页Journal of Chinese Electron Microscopy Society

基　　金：国家自然科学基金资助项目(No.50532090,No.60606023,No.60476044);科技部973项目(2002CB613502);Australia Research Council discovery project(DP0663304).~~

摘　　要：通过分子束外延法在经Mg预处理的蓝宝石衬底上制备了ZnO单晶薄膜,利用高分辨透射电镜、电子全息和X射线能谱对该薄膜的结构进行了细致的研究。结果表明,在蓝宝石衬底上预沉积一层很薄的Mg层,可以生长均匀Zn极性的ZnO外延薄膜。ZnO/MgO/蓝宝石的界面非常清晰锐利,同时在界面处可以观察到大约3个原子层的MgO。预沉积的Mg薄层对随后ZnO的极性选择起了关键性作用。　The structure of the ZnO films grown on（0001）sapphire using surface modification of magnesium pre-exposure has been investigated by high resolution transmission electron microscopy,electron holography and X-ray energy dispersive spectroscopy.It is found that pre-deposition of an ultra-thin magnesium film on the sapphire substrate plays a key role in zinc polarity selection and rotation domains elimination of ZnO films.In the resulting sharp interfaces of ZnO/MgO/sapphire,an ordered MgO layer（～3 atomic layers）was observed,which serves as a uniform template for nucleation and growth of a single-domain ZnO film.

关 键 词：ZNO薄膜 透射电子显微术 电子全息术 极性 X射线能谱 

分 类 号：TB43[一般工业技术] O484[理学—固体物理]