MgB_2超导材料的薄膜制备及其超导器件的实现  

Film Fabrication and Electronic Devices of MgB_2 Superconductor

作　　者：吴克[1] 余增强[1] 张解东[1] 聂瑞娟[1] 王福仁[1] 

机构地区：[1]北京大学物理学院,北京100871

出　　处：《北京大学学报（自然科学版）》2007年第5期614-619,共6页Acta Scientiarum Naturalium Universitatis Pekinensis

基　　金：国家重点基础研究发展计划(2006CB601007);高等学校博士学科点专项科研基金资助项目

摘　　要：报道了采用电子束蒸发技术实现MgB2薄膜制备的实验工作。通过蒸镀B膜和Mg/B多层膜两种前驱体,分别经高温区(～900℃)和中温区(～700℃)退火处理后成功获得了高质量的MgB2薄膜样品。对样品的超导性能、晶体结构和表面形貌进行了详细的测量和表征,并对两类样品性质上所表现出的差异进行了分析。此外,还报道了在薄膜制备基础上利用微加工技术实现的超导微波谐振器的结果。The work on fabrication of MgB2 superconducting thin films via E-Beam evaporation approach is reported. With the Boron filnl and Mg/B muhilayer precursors followed by post-annealing at 900℃ and 750℃ respectively, high quality MgB2 fihns have successfully been achieved. Superconducting properties of the samples have been measured and the crystal structure and surface topography have also been characterized. The results showed the performance of these two types of samples was significantly different. Some analyses have been proposed to explain this contrast. Besides, a microwave resonator has been realized based on the superconducting MgB2 films prepared by this technique.

关 键 词：MGB2 超导薄膜 电子束蒸发 退火处理 微波谐振器 

分 类 号：O511[理学—低温物理]