水平臂式三坐标测量机的误差补偿  

Study on the error compensation model of double cantilever 3D CMM

作　　者：王克新[1] 郭敬滨[1] 张国雄[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《电子测量技术》2007年第9期34-36,共3页Electronic Measurement Technology

摘　　要：根据水平臂三坐标测量机的结构特点,提出了非刚体三坐标测量机的误差补偿技术。在刚体误差补偿模型的基础上引入附加函数项,通过对测量机的横梁和立柱的详细研究,研究包括横梁和立柱的结构分析,受力分析及误差分析,推导出附加函数的回归方程。从而得到非刚体模型三坐标测量机的误差补偿理论公式。最后利用激光干涉仪对补偿结果进行检验,补偿结果证明非刚体误差补偿技术能有效的提高测量机的精度。According to the structural feature of cantilever 3D CMM, error compensation of non-rigid body 3D CMM is presented. We introduce additional function in the error compensation of rigid body model. Through structural analysis including dynamics analysis and error analysis of horizontal beam and vertical column of 3D CMM we deduce the regression equation of additional function and theory formula of error compensation. At last the effectiveness of this model is tested by laser interferometer. The results of measuring prove the exactness of the error model.

关 键 词：三坐标测量机 误差补偿 误差模型 非刚体模型 附加函数 

分 类 号：TH72[机械工程—仪器科学与技术]