表面等离子体调制的纳米孔径垂直腔面发射激光器  

Surface plasmon modulated nano-aperture vertical-cavity surface-emitting laser

作　　者：高建霞[1] 宋国峰[1] 郭宝山[1] 甘巧强[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所,纳米光电子实验室北京100083

出　　处：《物理学报》2007年第10期5827-5830,共4页Acta Physica Sinica

基　　金：中国科学院知识创新工程资助;国家高技术研究发展计划(863)(批准号:2002AA313060)资助的课题~~

摘　　要：在普通850nm垂直腔面发射激光器基础上制备了表面等离子体调制的纳米孔径垂直腔面发射激光器.当小孔直径为200nm,周围光栅的周期为400nm时,在15mA驱动电流下最大输出光功率达到了0.3mW.介绍了该器件的制备工艺,并从实验和理论两方面分析了周期性光栅结构对光束的约束作用.Surface plasmon modulated nano-aperture vertical-cavity surface-emitting lasers were fabricated from common 850 nm VCSELs. When the diameter of the aperture was 200 nm, and the period of grating was 400 nm, the maximum far-field output power reached 0.3mW at a driving current of 15 mA. The fabrication process was described and the beaming properties were studied via experimentally and theoretically.

关 键 词：表面等离子体 纳米孔径垂直腔面激光器 输出光功率 远场特性 

分 类 号：O539[理学—等离子体物理] TN248[理学—物理]