压阻式微加速度计动态特性与阻尼的关系研究  

Damping in piezoresistive micro accelerometer

作　　者：毛海央[1] 熊继军[1] 张文栋[1] 徐栋[1] 范波[1] 

机构地区：[1]中北大学电子测试技术国防重点实验室,太原030051

出　　处：《仪器仪表学报》2007年第9期1594-1599,共6页Chinese Journal of Scientific Instrument

基　　金：国家自然科学基金重点项目(50535030);霍英东基金(101052);新世纪优秀人才计划资助项目

摘　　要：采用微机械加工工艺制作的压阻式微加速度计在测试过程中经常出现动态特性欠佳甚至于结构损坏的现象,在压阻式微加速度计中,合理设计阻尼参数有助于改善传感器的动态特性。将压阻式微加速度计简化为二阶模型,定性分析了系统动态特性与阻尼之间的关系,研究了压阻式微加速度计结构中阻尼的设计和控制方法,仿真、比较了带不同阻尼参数传感器系统的动态特性,并通过实验验证了仿真分析的正确性。The dynamic characteristics of the piezoresistive micro accelerometers fabricated using micromachining techniques are not as good as expected, some of the accelerometers may even be damaged in the measurement procedure. If a proper damping parameter is set for an accelerometer system, its dynamic characteristics can be improved. The piezoresistive micro accelerometer is simplified as a second-order system; the relationship between its dynamic characteristic and damping is analyzed qualitatively. The design and control method of damping in piezoresistive micro accelerometer structure is studied; accelerometers with different damping parameters are simulated and their dynamic characteristics are compared with each other. Finally, experimental results prove the correctness of the simulation results.

关 键 词：阻尼 压阻式微加速度计 二阶系统 动态特性 

分 类 号：TN302[电子电信—物理电子学]