掺铬类石墨薄膜摩擦学性能研究  

Study on the Tribological Properties of Graphite-like Carbon Coatings Doped with Chromium

作　　者：严少平[1] 蒋百灵[2] 段冰[2] 顾广颐[1] 孙雅琴[1] 

机构地区：[1]安徽理工大学理学院,安徽淮南232001 [2]西安理工大学材料科学与工程学院,陕西西安710048

出　　处：《安徽理工大学学报（自然科学版）》2007年第3期62-66,共5页Journal of Anhui University of Science and Technology:Natural Science

基　　金：国家863科技攻关项目(2005AA33H010);安徽省教育厅自然科学基金(2005kj034zd)

摘　　要：采用非平衡磁控溅射离子镀技术，以电流控制方式在高速钢和硅基底上制备了不同Cr含量的C／Cr类石墨薄膜，测量了类石墨膜的显微硬度、膜基结合强度、摩擦系数和比磨损率，分析了薄膜的相结构，观察了薄膜的表面和断面形貌。结果表明：所制备的类石墨薄膜随Cr含量的增高，硬度逐渐降低，结合强度先增后降，摩擦系数和比磨损率则先降后升；类石墨膜是含有多种纳米晶的非晶结构；金属元素Cr含量影响了类石墨碳膜的表面形貌和组织结构。当Cr含量在0．5％～2．5％时，薄膜表面光滑而结构致密，摩擦系数小且比磨损率低，膜基结合强度高，具有良好减摩耐磨性能。Graphite-like carbon （GLC） coatings doped with different chromium contents were prepared by four-targets unbalanced magnetron sputter ion plating technique on substrate of single crystal silicon and High Speed Steel （HSS） by means of altering sputtering current on chromium targets. The microhardness, bonding strength, friction coefficient and specific wear-rate of the coatings were measured, and the microstructures of the coatings were analyzed through X--Ray Diffraction （XRD） and Scanning Electron Microscopy （SEM）. The results indicates that the micro-hardness decreased monotonously; bonding strength first increased and then decreased; friction coefficient and the specific wear-rate decreased first and then increased with the accretion of chromium contents; XRD analyses revealed GLC thin film is non-crystal structure, which consists of multi nano-crystal; content of metal element Cr led to changes of surface and cross-section morphologies and microstructure of the coatings. While the contents of chromium set to be form 0. 5% to 2.5%, smooth and compact GLC were deposited with low friction coefficient, very small specific wear-rate, the bonding strength of the coatings as well, and shew well friction-reducing and antiwear abilities.

关 键 词：类石墨膜 摩擦学性能 非平衡磁控溅射 显微硬度 组织结构 

分 类 号：TH117.3[机械工程—机械设计及理论]