压电陶瓷驱动微位移机构迟滞非线性改善方法研究  

Research on improving hysteresis of piezoelectric actuator used in micro-displacement mechanism

作　　者：王宏亮[1] 崔红娟[1] 陈志华[1] 

机构地区：[1]国防科学技术大学机电工程与自动化学院,长沙410073

出　　处：《现代制造工程》2007年第10期4-7,47,共5页Modern Manufacturing Engineering

基　　金：国家自然科学基金资助项目(50575223)

摘　　要：压电陶瓷驱动器在精密微位移系统中有着广泛的应用,但其固有的迟滞非线性严重影响系统的运动精度,使控制困难。通过数学建模方法建立压电陶瓷的迟滞曲线逆模型,并用此模型对压电陶瓷进行位移补偿,可以有效减小压电陶瓷迟滞非线性对系统精确控制的影响。提出一种用两个压电陶瓷协同驱动微动平台运动的微位移机构,通过基于迟滞逆模型的开环控制方法,对压电陶瓷位移进行误差补偿,可以实现微动平台运动与控制信号较好的线性对应关系。The piezoelectric actuators are used widely in the field of precise displacement system,but the inherent hysteresis and nonlinearity characteristics not only lower the moving accuracy of system but also make the control system more difficulty. To construct a hysteretic inverse model of piezoelectric actuator with mathematic modeling method and use this model to compensate the displacement error can reduce the hysteresis nonlinearity influence effectively in precise control system. A micro-displacement mechanism is proposed, which use two piezoelectric actuators work together to drive the micro displacement table moving. By using the control method under open-loep operation based on the inverse hysterefic model, the moving of micro-displacement mechanism and the control signal would have a better linear corresponding relationship with compensating the displacement error of piezoelectric.

关 键 词：压电陶瓷驱动器 迟滞非线性 微位移机构 

分 类 号：TH16[机械工程—机械制造及自动化]