Bi_(4-x)La_xTi_3O_(12)铁电薄膜结构和光学性能研究  

STRUCTURAL AND OPTICAL PROPERTIES OF Bi_(4-x)La_xTi_3O_(12) THIN FILMS

作　　者：杜凤娟[1] 刘毅[1,2] 陶科玉[2] 阳生红[1] 张曰理[1] 

机构地区：[1]中山大学光电材料与技术国家重点实验室,物理科学与工程技术学院,广东广州510275 [2]深圳大学师范学院,电子科学与技术学院,广东深圳518060

出　　处：《红外与毫米波学报》2007年第5期332-335,共4页Journal of Infrared and Millimeter Waves

基　　金：国家自然基金(50372085);广东省科技计划项目(2004B60303001;2006A1100100)

摘　　要：用化学溶液沉积法分别在Si(100)和石英玻璃衬底上成功制备了一系列Bi4-xLaxTi3O12(BLT)铁电薄膜;用X-射线衍射仪测量了不同退火温度和不同掺镧量的BLT薄膜的结晶情况,结果显示随着退火温度的升高BLT薄膜结晶越来越好,镧的掺入并不改变钛酸铋薄膜的钙钛矿结构;用椭偏光谱仪对不同退火温度的BLT薄膜进行了椭偏光谱测量,分析得到了薄膜的光学常数谱;用激光显微拉曼光谱仪对不同掺镧量的BLT薄膜进行激光拉曼谱测量,得到了BLT薄膜振动模式随掺镧量的变化.Lanthanum-substituted bismuth titanate（BLT） thin films were deposited on Si （100） substrates and on quartz substrates by using the chemical solution deposition method. The crystallinity of BLT thin films was examined by X-ray diffraction （XRD）. X-ray diffraction analyses show that the BLT thin films are polycrystalline and the crystalline quality of the films is improved with the increasing of annealing temperature. The optical properties of the BET thin films were investigated by using a spectroscopic ellipsometry. The optical constant spectra （refractive index n and the extinction coefficient k） of the BLT thin films were obtained. Laser micro-Raman spectrometer was used to study the lattice vibration modes of the BLT thin films deposited on quartz substrates.

关 键 词：铁电薄膜 椭偏光谱 拉曼光谱 BLT薄膜 

分 类 号：O484[理学—固体物理]