基于ZnO/金刚石/Si结构的瑞利波频散特性计算  

Calculation of the Dispersion Properties of Rayleigh Wave on ZnO/Diamond/Si-Layered Structure

作　　者：董加和[1] 杨成韬[1] 郑泽渔[1] 李健雄[1] 张树人[1] 

机构地区：[1]电子科技大学微电子与固体电子学院,成都610054

出　　处：《电子科技大学学报》2007年第5期952-954,968,共4页Journal of University of Electronic Science and Technology of China

基　　金：国防科研基金资助项目

摘　　要：结合声表面波的基本理论和递归刚度矩阵法,通过将瑞利波从声表面波中分离,推导出基于ZNO/金刚石/Si结构的有效介电常数数学模型。根据所建立的数学模型,采用Matlab编制出相应程序,计算得到瑞利波的相速度和机电耦合系数频散曲线。该频散曲线具有较高的精确性,能很好地反映出瑞利波的频散特性。本文从解基本的波动方程理论出发,得到了三层结构的有效介电常数数学模型,并且将其程序化,最终得到了声表面波器件设计中的两个重要参数,为多层薄膜器件的设计奠定了一定的基础。Combining basic Surface Acoustic Wave （SAW） theory with reported recursive stiffness matrix method, this paper deduces an effective permittitivity mathematical model of Rayleigh wave based on ZnO/Diamond/Si-layered structure through separating the Rayleigh wave from SAW. By this model the dispersive figures including phase velocity and electromechanical coupling coefficients are calculated. The calculation results show that the model has good accuracy and reflects well the dispersion properties of Rayleigh wave. Furthermore, an effective permittitivity mathematical model of three layers from solving basic wave equations is derived. At last, two important parameters which are used in designing SAW devices are calculated.

关 键 词：频散特性 有效介电常数 瑞利波 递归刚度矩阵法 

分 类 号：O423[理学—声学] O347.4[理学—物理]