液相检测的Love波传感器的制作与研究  

Fabrication and Research of Love Wave Sensor for Operating in Liquid Media

作　　者：史建亮[1] 胡友旺[1] 贾宏光[1] 张平[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室

出　　处：《压电与声光》2007年第5期533-536,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60474055)

摘　　要：在分析Love波传感器液相质量检测机理的基础上,设计并制作了以36°YXLiTaO3为基底,交联处理的聚甲基丙烯酸甲酯(PMMA)为波导层的Love波器件。器件的中心频率为118 MHz,插损为-16 dB。通过建立电镀实验模型,实时的检测了在液相中吸附于阴极薄膜上铜的质量,并测试到传感器的灵敏度为-0.387 cm2/g。分析了灵敏度实验值与理论值的差别,进一步提出了改进方案与措施。By studying the mechanism of detecting mass load in liquid media , Love wave device using crosslinked polymethylmethacrylate （PMMA） waveguides on LiTaOa substrates was fabricated. The center frequency of the device was 118 MHz. The insertion loss was - 16 dB. The experimental model of electroform was set up. The Love wave device was allowed to detect the mass of copper on the cathode in real time. The sensitivity of -0. 387 cm^2/g of the sensor was detected. Meantime, the difference between experimental value and academic value of the sensitivity was analyzed. Some ideas and measures to improvement were given.

关 键 词：Love波器件 聚甲基丙烯酸甲酯(PMMA)波导层 LiTaO3压电基底 叉指换能器 

分 类 号：TP212.3[自动化与计算机技术—检测技术与自动化装置]