不同择优取向Bi_(3.25)La_(0.75)Ti_3O_(12)薄膜的铁电性质  

Ferroelectric Properties of Bi_(3.25)La_(0.75)Ti_3O_(12) Films with Different Preferential Orientations

作　　者：贾彩虹[1] 田建军[1] 丁玲红[1] 张伟风[1] 

机构地区：[1]河南大学物理与信息光电子学院,河南开封475001

出　　处：《压电与声光》2007年第5期589-592,共4页Piezoelectrics & Acoustooptics

基　　金：河南省高等学校创新人才培养工程基金资助项目(2002006)

摘　　要：采用化学溶液沉积法在p-Si(100)衬底上制备了LaNiO3(LNO)下电极和Bi3.25La0.75Ti3O12(BLT)铁电薄膜,分别用X-射线衍射、原子力显微镜、扫描电镜和铁电测试仪对样品的微结构和铁电性质进行了系统分析。结果表明,低热解温度下制备的LNO薄膜具有(110)择优取向、小的颗粒尺寸和大的电阻率;而高热解温度下制备的LNO薄膜具有(100)择优取向、大的颗粒尺寸和小的电阻率。与以往报道不同,c轴择优取向度大的BLT薄膜显现出更大的剩余极化强度和更小的漏电流,具有更优越的铁电性质。Conductive LaNiO3 （LNO） and ferroelectric Bi3.25La0.75Ti3O12 （BLT） thin films have been prepared by chemical solution deposition （CSD）. Their microstructures and ferroelectric properties were investigated by X-ray diffraction, atomic force microscope, scanning electron microscope, and ferroelectric tester, respectively. The results showed that for the LNO films, a low pyrolysis temperature favors the growth of （110）-oriented small grains and induces large resistiviteis, while a high pyrolysis temperature results in the nucleation of （100）-oriented large grains and induces small resistivities; and that the structures and ferroelectric properties of the BLT films critically depended on the preferential orientation of LNO bottom electrodes, that is, the improved （001）-oriented BLT films on （100）LNO exhibited higher remanent polarization than random oriented BLT films on （110）LNO, which is quite different from previous reports.

关 键 词：铁电薄膜 Bi3.25La0.75Ti3O12 LANIO3 化学溶液沉积法 

分 类 号：TM221[一般工业技术—材料科学与工程]