溶胶-凝胶技术制备Bi_4Ti_3O_(12)铁电薄膜的研究  

Investigation on the Preparation of Bi 4Ti 3O 12 Ferroelectric Thin Films by Sol gel Technique

作　　者：刘梅冬[1] 李楚容[1] 曾亦可[1] 王培英[1] 饶韫华 

机构地区：[1]华中理工大学固体电子学系

出　　处：《功能材料》1997年第3期297-299,共3页Journal of Functional Materials

基　　金：国家科学自然基金

摘　　要：采用溶胶－凝胶技术在Ｓｉ单晶基片上制备了具有层状钙钛矿型结构的Ｂｉ４Ｔｉ３Ｏ１２铁电薄膜。讨论了回火温度与时间对薄膜结构的影响。Ｘ射线衍射分析表明，经７００℃和７００℃以上温度回火的薄膜为具有层状钙钛矿型结构的Ｂｉ４Ｔｉ３Ｏ１２多晶薄膜。该薄膜的电滞回线测试呈现出剩余极化强度Ｐｒ＝５μＣ／ｃｍ２，矫顽场Ｅｃ＝１３０ｋＶ／ｃｍ。Bi 4Ti 3O 12 ferroelectric thin films with a layer perovskite structure have been prepared on an Si single crystal substrate by sol gel technique.The influence of annealing temperature and time on the structure of Bi 4Ti 3O 12 thin films has been researched.X ray diffraction analysis proved that polycrystaline Bi 4Ti 3O 12 thin films can be obtained at annealing temperature 700℃ or more than 700℃.The remanent polarization P r and the coercive field E c of Bi 4Ti 3O 12 thin films were 5μC/cm 2 and 130kV/cm respectively.

关 键 词：铁电薄膜 溶胶-凝胶法 钛酸铋 薄膜 

分 类 号：TM221[一般工业技术—材料科学与工程] TB43[电气工程—电工理论与新技术]