(Ti_(1-x)Al_x)N硬质涂层的研究进展  

Recent Research and Applications of (Ti_(1-x)Al_x)N Thin Hard Coating

作　　者：张飞[1] 闫鹏勋[1] 陈江涛[1] 苗彬彬[1] 李冠斌[2] 王君[1] 

机构地区：[1]兰州大学等离子体与金属材料研究所,兰州730000 [2]兰州物理研究所表面工程国防科技重点实验室,兰州730000

出　　处：《人工晶体学报》2007年第3期699-704,691,共7页Journal of Synthetic Crystals

基　　金：军工预研(No.51468020105JW2301)

摘　　要：TiAlN作为一种三元复合纳米涂层材料,具有非常好的性能。该涂层克服了TiN涂层所存在的一些缺陷,其硬度远远高于TiN涂层,最高可达47GPa,并且具有很好的热稳定性,在700℃高温下仍很稳定,而TiN涂层在500℃时就已被氧化。TiAlN涂层还具有抗磨损,摩擦系数小,热膨胀系数及热传导系数低等特性,这些特性与涂层中Al含量的多少有关,Al含量的改变会导致涂层微观结构的改变,从而使其性能发生变化。氮分压和基底温度对TiAlN涂层的性质有着极其重要影响。本文结合国内外对TiAlN涂层的最新研究进展,对TiAlN涂层的应用,制备方法,结构,抗氧化性及硬度作了简要论述。As a kind of ternary nanocomposite thin hard coatings, TiAlN thin hard coatings showed super mechanical properties than TiN coatings, for instance, the hardness of TiAlN coatings can reach 47GPa, much higher than that of TiN coatings; and TiAlN coatings are thermally stable until 700℃, but TiN coatings are oxidation at 500℃. In addition, TiAlN coatings have other superiorities such as super wear resistance, lower friction, lower thermal expansion and lower thermal conductivity, which is influenced by the Al content of film, the temperature of substrate and the nitrogen flux. In this paper, the applications, preparation, crystal structure, antioxidation and hardness of the TiAlN coatings are introduced in brief.

关 键 词：TIALN涂层 晶体结构 抗氧化性 硬度 综述 

分 类 号：O484[理学—固体物理]