新型微流通池pH-ISFET集成传感器的研制  

DEVELOPMENT OF A NOVEL MICRO FLOW-THROUGHCELL Ph-ISFET INTEGRATED SENSOR

作　　者：牛蒙年[1] 丁辛芳[1] 

机构地区：[1]东南大学

出　　处：《应用科学学报》1997年第1期75-81,共7页Journal of Applied Sciences

摘　　要：报道了一种新型微流通池ｐＥ－ＩＳＦＥＴ集成传感器，该集成传感器采用常规ＩＣ工艺、微加工技术和键合技术，实现微流通池、四对长臂式ＩＳＦＥＴ／ＲＥＦＥＴ传感器（差分测量用）和Ｔｉ／Ａｕ膜伪参考电极芯片一体化结构，芯片面积为８ｍｍｘ６ｍｍ，微流通池体积为０．７ｍｍｘ５．０ｍｍ×０．３ｍｍ，当集成传感器外部配上蠕动泵、注入阀和测量电路则构成微流通池ｐＨ－ＩＳＦＥＴ流动注入分析（ＦＩＡ）系统。实验结果表明，该集成传感器和ＦＩＡ系统具有响应快、耗样液量少等特点，且稳定性和可靠性大为提高。Based on the normal IC process, micro machining technology andbonding technology, a novel micro flow-through cell pH-ISFET integratedsensor has been developed, which comprises micro flowthrough cell, four pairlong-armed ISFET/REFET sensor (differential measurement) and Ti/Au filmpseudo-reference electrode. The chip area and micro flow-through cell's Volumeare 8×6mm2 and 0.7×5.0×0.3mm3, respectively. The integrated sensor togetherwith extra peristaltic pump, injection valve and measurement circuits consists ofmicro flow-through cell pH-ISFET FIA (flow-injection analysis) system,Experimental results show that the integrated sensor and FIA system have fastresponse, small sample consumption, and other features and its stability andreliability are also ameliorated.

关 键 词：传感器 微流通池 pH-ISFET传感器 流动注入分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH832[自动化与计算机技术—控制科学与工程]