MIUC poly-Si TFT显示驱动电路的性能优化  

Optimization of the Display Driving Circuit for MIUC poly-Si TFT

作　　者：吴春亚[1] 孟志国[1] 李娟[1] 马海英[1] 熊绍珍[1] 王文[2] 郭海成[2] 

机构地区：[1]南开大学光电子所,天津300071 [2]香港科技大学电气与电子工程系

出　　处：《光电子．激光》2007年第11期1276-1279,共4页Journal of Optoelectronics·Laser

基　　金：国家自然科学基金资助项目(60437030);国家'863'计划资助项目(2004AA303570);天津市基金资助项目(D5YFJMJC01400)

摘　　要：以金属诱导单向横向晶化多晶硅薄膜晶体管(MIUC poly-Si TFT)为基本器件单元,采用2M1P 5μmCMOS工艺研制出适合于作全集成有源显示周边驱动的行扫描和列驱动电路。行扫描和列驱动电路的工作频率随工作电压呈指数式增加,然后趋于线性增长。在外加激励信号电压为10 V时,工作频率可以达5 MHz。在5 V电压应力条件下连续工作15 000 s,行扫描和列驱动电路的输出特性基本不衰退。将这样的行、列驱动电路集成制作于像素矩阵电路的周边,研制出具有良好动态显示功能的彩色'板上系统(SOP)'型有源选址液晶显示器(AMLCD)模块。Using metal-induced unilaterally crystallization technology, polycrystalline silicon thin film with large lateral grain size up to 5 μm has been obtained. P channel and N channel poly-si TFTs, prepared on this material with the optimized processes behaved high performance with the field-mobility higher than 100 cm^2/V· s, the ratio of on-state current （Ion） to off-state current （Ioff） higher than 107 and the threshold voltage lower than 3 V. In this paper,based on the improved MIUC poly-Si TFT technology and the two-metal-one-poly CMOS techniques, the peripheral driving circuit for active matrix liquid crystal display and active matrix organic light emitting display were made on a glass substrate. The measurement results of the electrical properties of the peripheral scan and data driving circuit module showed that their working frequency increased with the applied working voltage exponentially,and tended to increase linearly. Their working frequency achieved to 5 MHz at the applied signal voltage of 10 V. Under the bias stress of 5 V,their electrical performance did not degrade with the stress time as long as 15 000 s. Integrated these scan and data driving circuits with the acitve-matrix of pixel driving circuit on the same glass substrate,a color MIUC poly-Si TFT system-on-panel（SOP） liquid crystal display module with good dynamic display function was demonstrated.

关 键 词：金属诱导单向晶化(MIUC) 热退火修饰 周边驱动电路 板上系统(S()P) 

分 类 号：TN916.3[电子电信—通信与信息系统]