高密度排列大功率垂直腔面发射激光器列阵  

Densely Packed High Power VCSEL Arrays

作　　者：王青[1] 曹玉莲[1] 何国荣[1] 韦欣[1] 渠红伟[1] 宋国峰[1] 马文全[1] 陈良惠[1] 

机构地区：[1]中国科学院半导体研究所纳米光电子实验室,北京100083

出　　处：《Journal of Semiconductors》2007年第11期1803-1806,共4页半导体学报（英文版）

基　　金：国家自然科学基金重点资助项目(批准号:60636030)~~

摘　　要：报道了980nm高密度排列大功率垂直腔面发射激光器列阵的研制.列阵单元为蜂窝状密堆积排列,单元台面直径为70μm,氧化孔径为30μm,相邻单元间隔为100μm.制作了含7,19,37个单元的列阵,讨论了它们的阈值电流和远场特性.在室温连续工作条件下,3种列阵的最大输出功率分别为0.26,0.5和0.6W.其中含37个单元的列阵在6A脉冲电流(脉宽30μs,重复频率100Hz)激发下,输出功率达到1.4W.The fabrication process of 980nm,densely packed, high power, VCSEL 2D-arrays is reported for the first time in China's Mainland. The individual elements of the arrays are arranged in a honeycomb-like layout, the mesa diameter of the ele- ment is 70μm, the oxide aperture is 30μm ,and the center-to-center spacing of neighboring elements is 100μm. VCSEL arrays containing 7,19 ,and 37 elements are fabricated, and the characteristics of the threshold current and the far-field angle are discussed. Given CW operation at room temperature,these three kinds of arrays have 0. 26,0. 5,and 0. 6W output power,re- spectively. With a 6A pulse current （30μs at 100Hz） ,the 37-elements array′s output power reaches 1.4W.

关 键 词：垂直腔面发射激光器 列阵 阈值电流 发散角 大功率 

分 类 号：TN248[电子电信—物理电子学]