一台国外引进微光管制备真空设备超高真空获得的技术改进  

A Obtained Improvement of Technology by Abroad Recommending Low-Light-Level Tube Maked Vacuum Equipment Ultra-High Vacuum

作　　者：徐江涛[1] 

机构地区：[1]西安应用光学研究所,陕西西安710100

出　　处：《真空电子技术》2007年第1期51-52,55,共3页Vacuum Electronics

摘　　要：介绍了国外引进微光管超高真空设备的系统结构、组成、设备功能及关键技术指标,得出了超高真空获得技术改进取得的结果,并对设备在国内的应用前景作了全面分析。The article overall and systematically introduced structure of system, composition function and key technical specification of low-light-level ultra-high vacuum equipment which was imported from overseas. And it can yield the result of ultra-high vacuum by technology improvement, then a whole analysis is made for application prospect of the equipment in china.

关 键 词：微光管 超高真空 传递铟封 阴极激活 GaAs阴极 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]