非平衡磁控溅射掺Ti类金刚石薄膜的结构分析  

STRUCTURE ANALYSIS OF Ti-DOPED DLC COATINGS DEPOSITED BY UNBALANCED MAGNETRON SPUTTERING

作　　者：聂朝胤[1] 张碧云[1] 谢红梅[1] 

机构地区：[1]西南大学材料科学与工程学院

出　　处：《金属学报》2007年第11期1207-1210,共4页Acta Metallurgica Sinica

基　　金：重庆市自然科学基金项目CSTC;2006BB4050;西南大学科技基金项目SWNUF2005001;SWNUB2005001资助~~

摘　　要：采用非平衡磁控溅射沉积技术在SCM415渗碳淬火钢基片上沉积了无氢Ti掺杂类金刚石(Ti-DLC)薄膜和无氢高纯类金刚石(DLC)薄膜,通过调节Ti靶的溅射功率使获得的Ti-DLC薄膜Ti含量(原子分数)为1.9%—34%.利用Raman分光光谱仪、XPS,XRD、显微硬度计及纳米划痕仪分析研究了Ti-DLC的组织结构、显微硬度及薄膜附着力.结果表明,利用非平衡磁控溅射得到的Ti-DLC薄膜,在Ti含量小于25%时,Ti-DLC薄膜仍具有类金刚石薄膜的sp^2,sp^3结构,但Ti的掺杂促进了sp^3键向sp^2键的转变.掺杂的Ti以TiC纳米晶的形式存在于非晶态的DLC中.掺杂Ti后薄膜的硬度明显降低,而薄膜附着力明显改善;但是当Ti含量超过3%后,薄膜附着力无明显变化,硬度逐渐回升.Using the unbalanced magnetron sputtering method, hydrogen-free titanium-doped diamond-like carbon （Ti-DLC） film and hydrogen-free pure diamond like carbon （DLC） film were deposited on carburized SCM415 steel substrate. As preparing TLDLC films, the sputtering power of titanium target was varied so that the Ti concentration in the films could be controlled from 1.9% to 34% （atomic fraction）. The structure, microhardness and adhesion strength were investigated by Raman spectrum, XPS, XRD, nano indenter and scratch tester. The results show that all the Ti-DLC coatings have a similar Raman spectrum with pure DLC, but dropping titanium will cause a transform from sp3 to sp2 configuration. The results also show that the hardness of Ti-DLC films decreases, and the adhesion strength increases drastically, when Ti concentration is above 3%, there is no obvious change in adhesion strength, but a slight increase in hardness which is due to the nanocomposite structure of TiC nanocrystals dispersing in the amorphous DLC films.

关 键 词：非平衡磁控溅射 Ti掺杂类金刚石薄膜 微观结构 显微硬度 附着力 

分 类 号：TB383[一般工业技术—材料科学与工程]