离子束辅助对真空电弧沉积掺氮二氧化钛薄膜特性的影响(英文)  

Influence of Ion Beam Assistance on Properties of Nitrogen-doped Titania Films Deposited by Cathodic Vacuum Arc

作　　者：成晓玲[1] 胡社军[2] 谢光荣[3] 曾鹏[3] 

机构地区：[1]广东工业大学分析测试中心,广东广州510090 [2]华南师范大学物理与电信工程学院,广东广州510631 [3]广东工业大学材料与能源学院,广东广州510090

出　　处：《中山大学学报（自然科学版）》2007年第B06期203-205,214,共4页Acta Scientiarum Naturalium Universitatis Sunyatseni

基　　金：国家自然科学基金资助项目(50271019);广东省科技计划基金资助项目(2004B10301010)

摘　　要：在氮氧混合气体中,通过离子束辅助,采用真空电弧沉积了氮掺杂的TiO2薄膜样品,研究了离子束流对掺氮二氧化钛薄膜的结构、光学性质和光催化性能的影响。实验结果表明:离子束辅助沉积的薄膜为非晶态结构,薄膜经500℃热处理后向锐钛矿转变,且锐钛矿的(101)面的峰最强。通过UV分析发现离子束辅助沉积的掺氮二氧化钛薄膜的吸收峰发生红移,其光催化活性随着离子束流的增大而减小。A nitrogen-doped titania film was prepared by cathodic vacuum arc method with ion-beam assistance in a mixed oxygen/nitrogen gas atmosphere. The effect of the ion beam current on the structural, optical properties and photocatalytic activity of nitrogendoped titania film was studied. The as-deposited films were subjected to annealing with the atmospheric environment, and the change of film properties after annealing was investigated. The struchzres of all as-deposited films were amorphous. In the annealing process, the ion-beam-assisted nitrogen-doped titania films had a phase transition from amorphous to anatase polycrystalline with a strong TiO2 anatase （ 101 ） peak at a temperature of 500℃. When the ion-beam assistance was applied, the deposited nitrogen-doped titania films were found to the spectrum response of nitrogen-doped titania film deposited with ion beam assisted extended to the visible region, photocatalytic activity of nitrogen-doped titania film decreases with ion beam current increase from 80 to 160mA.

关 键 词：离子束辅助沉积 二氧化钛薄膜 氮掺杂 光催化 

分 类 号：O614[理学—无机化学]