压电陶瓷对STM图像的影响及计算机校正  

Computer Correction for Distorted STM Images Caused by Piezoceramics

作　　者：江月山[1] 王晓光[1] 杨乃恒[1] 高聚宁[2] 刘宁 杨海强 时东霞[2] 庞世瑾[2] 

机构地区：[1]东北大学真空工程系,沈阳110006 [2]中国科学院北京真空物理实验室,北京100080

出　　处：《真空科学与技术》1997年第4期264-268,共5页Vacuum Science and Technology

摘　　要：在很多情况下，扫描隧道显微镜（STM）图像的几何形貌方面的误差主要是由压电陶瓷的漂移、X扫描器和Y扫描器的压电系数的不一致性和压电陶瓷扫描时的非正交性引起的。本文建立了一种物理数学模型来校正这些误差，取得了满意的结果。即使在漂移的状态下，也可以利用已知结构的表面对STM仪器进行校准（例如，高定向石墨表面）。用校准以后的STM仪器，可以获得样品表面的真实图像，并使对样品进行原子级的测量成为可能。In quite a few cases,the image distortion of a scanning tunneling microscope(STM)is essentially caused by thermal drift,the different piezoelectric constants between the X and Y scanners and the nonorthogonal scanning. A physical and mathematical model is proposed to correct such distortions,with satisfactory results. Using this model,one can perform the STM calibration with a known surface structure (for example,the highly oriented pyro1ytic graphite surface) even in the presence of a drift. Using such a calibrated STM and the described model,it is possible to obtain the real STM driage and make measurements for unknown surfaces on the atomic scale.

关 键 词：扫描隧道显微镜 图像 压电陶瓷 计算机校正 

分 类 号：TN16[电子电信—物理电子学] TM282[一般工业技术—材料科学与工程]