场致发射阴极碳纳米管的热化学气相沉积法低温生长  

Low temperature growth of carbon nanotubes by chemical vapor deposition for field emission cathodes

作　　者：郭平生[1] 陈婷[1] 曹章轶[1] 张哲娟[1] 陈奕卫[1] 孙卓[1] 

机构地区：[1]华东师范大学纳光电集成与先进装备教育部工程研究中心纳米功能材料和器件应用研究中心,物理系,上海200062

出　　处：《物理学报》2007年第11期6705-6711,共7页Acta Physica Sinica

基　　金：上海市科委纳米专项项目(批准号:0114nm056;0452nm048);教育部重点项目(批准号:02105)资助的课题.~~

摘　　要：结合丝网印刷和过滤阴极真空电弧法、离子束溅射方法,在普通玻璃衬底上制备催化剂图案,采用低温热化学气相沉积法(CVD)生长碳纳米管/纤维(CNTs)薄膜.研究了不同种类催化剂对CNTs薄膜生长及其场发射的影响.结果表明,在a-C:Co,Ni-Cu和Cu三种催化剂上没有获得明显的CNTs,在外加电场小于4.4V/μm时没有观察到场发射;而在Ni-Fe及Ni-Cr两种催化剂上获得了大量的CNTs,并且表现出良好的场发射性能,开启电场为2.5V/μm.这种热CVD有简单、低温等优点,在CNTs场发射显示器的阴极制备中有潜在的应用价值.　Carbon nanotubes/nanofibers（CNTs）were grown on sodalime glass by low temperature chemical vapor deposition.The catalytic films were pre-patterned using screen-printing method,combined with filtered cathodic vacuum arc or ion beam sputtering.The effect of different catalysts on the CNT growth and field emission were investigated.For samples catalyzed with a-C：Co,Ni-Cu or Cu,no CNTs are formed,and they show no field emission below the applied field of 4.4V/μm.For samples catalyzed with Ni-Fe or Ni-Cr,large amounts of entangled CNTs are successfully obtained and exhibit good electron emission,having a turn-on field as low as 2.5V/μm.The process,due to its simplicity and relatively low growth temperature,is promising for practical application in field emission display.

关 键 词：化学气相沉积 场致发射 碳纳米管 扫描电子显微镜 

分 类 号：O462.4[理学—电子物理学]