球形金刚石的生长机理研究  

Growth mechanism on ball-like diamond

作　　者：黄元盛[1] 邱万奇[2] 罗承萍[2] 

机构地区：[1]韶关学院机电系,广东韶关512005 [2]华南理工大学机械工程学院,广东广州510640

出　　处：《韶关学院学报》2007年第3期61-63,共3页Journal of Shaoguan University

基　　金：广东省自然科学基金项目(013004;04300026);韶关市科技计划项目(2004-14)

摘　　要：用热丝化学气相沉积设备研究了钢渗铬层、P-Si(100)基片和三氧化二铝基底表面形成的球形金刚石.研究结果表明:在不适合球形金刚石形成的工艺条件下,在P-Si(100)基片和三氧化二铝表面沉积的晶形很好的金刚石膜中也存在球形金刚石团块(称为异常长大金刚石团块);首次使用金刚石“异常晶核”解释了异常长大金刚石团块的形成.球形金刚石膜由异常长大金刚石团块组成.异常长大金刚石团块的形成不但与沉积工艺参数有关,而且与CVD金刚石生长特性有关.Ball-like diamond deposited on the chromized layer, P-Si （100） and Al2O3 substrates has been investigated using the hot-filament chemical vapor deposition equipment. The result shows that ball-like diamond conglomeration （hereafter called abnormal diamond conglomeration） also loans on silicon wafer and Al2O3 at high temperature, low methane concentration and low chamber pressure. It is the first time that authors have used the word ＂abnormal nucleus＂ to interpret the formation of abnormal diamond conglomeration. Ball-like diamond films are composed of abnormal diamond conglomeration that is related with not only deposition parameters but also CVD diamond growth nature.

关 键 词：球形金刚石 金刚石团块 异常长大 异常晶核 气相沉积 

分 类 号：O484[理学—固体物理]