高压工艺N阱电阻SPICE模型研究  

Research on NWELL Resistor SPICE Model of HV Process

作　　者：李月影[1] 李冰[1] 何小东[2] 

机构地区：[1]东南大学集成电路学院,南京210096 [2]华润上华科技有限公司,江苏无锡214061

出　　处：《电子与封装》2007年第11期39-44,共6页Electronics & Packaging

摘　　要：文章对0.5μm/40V高压工艺中形成的N阱电阻的SPICE模型进行研究。因为高压电路的实际应用,N阱电阻的寄生效应不可忽略,所以精确反应其电学特性的SPICE模型也显得尤为重要。从N阱电阻的测量结果反映其IV曲线的非线性特性和结型栅场效应管JFET输出特性曲线具有相似性,并通过对高压阱电阻与JFET的结构分析认为可以采用JFET的电压电流关系来建立合理的数学模型反映高压阱电阻的这种非线性特性。因此在文中借用JFET的SPICE模型作为基础,用宏模型的方法为高压N阱电阻建立了一套精确的SPICE模型。此模型适用于各类仿真器,具有一定的通用性。This paper research the SPICE model of NWELL resistor in 0.5 μ m/40V high voltage process. Due to the high voltage circuit application, the parasitical effect of NWELL resistor can not be ignored. So the accurate SPICE model of NWELL resistor is specially important. The testing result shows that the resistor＇s non-linear IV curve is similar with JFET. By analyzed and compared the structure between high voltage NWELL resistor and JFET, the IV equation of JFET can be utilized to set up one model for high voltage NWELL resistor to reflect its non-linear characterization. So this paper extracts a set of accurate SPICE model of NWELL resistor using macro model method base on JFET SPICE model. This model is universal and it can be used in all kinds of simulator.

关 键 词：高压N阱电阻 SPICE模型 结型栅场效应管JFET 

分 类 号：TN405[电子电信—微电子学与固体电子学]