压电执行器非线性控制方法研究进展  

The Development on the Nonlinear Control Method of Piezoelectric Actuator

作　　者：周淼磊[1] 杨志刚[2] 田彦涛[1] 高巍[1] 程光明[2] 曲兴田[2] 

机构地区：[1]吉林大学通信工程学院,吉林长春130025 [2]吉林大学机械科学与工程学院,吉林长春130025

出　　处：《压电与声光》2007年第6期656-659,662,共5页Piezoelectrics & Acoustooptics

基　　金：国家"八六三"高科技基金资助项目(2001AA423270);中国博士后科学基金资助项目(2005037185)

摘　　要：压电执行器在微驱动和微定位领域应用广泛,但压电执行器在输入电压和输出位移间存在着迟滞非线性。非线性的存在使压电执行器定位精度降低,动态响应速度变慢,是其工程上进一步应用的主要障碍。减小和消除迟滞非线性成为实现高精度控制的关键。总结了近年来国内外在减小和消除压电执行器迟滞非线性方面上的研究工作,并指出当今研究的热点及未来研究的方向。Piezoelectric actuator is widely used in micro-driver and micro-positioning domain. However, piezoelectric actuator has hysteresis nonlinearity. The control accuracy and dynamic response characteristic of piezoelectric actuator are influenced because of its nonlinearity. The application of piezoelectric actuator is limited. The key of the high precise control is reducing and eliminating the hysteresis nonlinearity. Current research work of reducing and eliminating hysteresis nonlinearity is summarized. Finally further research fields are suggested.

关 键 词：压电执行器 非线性 迟滞 控制方法 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]