LSMCD法制备梯度BST铁电薄膜的工艺研究  

Study on Production Technology of Gradient BST Thin Films by LSMCD Technique

作　　者：白天[1] 张之圣[1] 王秀宇[1] 毕振兴[1] 

机构地区：[1]天津大学电子信息工程学院电子科学与技术系,天津300072

出　　处：《压电与声光》2007年第6期743-745,共3页Piezoelectrics & Acoustooptics

基　　金："九八五"教育振兴行动计划学科建设基金资助项目

摘　　要：研究了利用液态源雾化化学沉积(LSMCD)法制备梯度钛酸锶钡(BST)薄膜的工艺。该方法既可以较精确的控制薄膜的化学计量比及掺杂浓度,又可采用控制超声雾化沉积的时间和次数来有效的控制膜厚及晶粒的大小。X-射线衍射(XRD)和扫描电镜(SEM)分析表明:沉积8次,采用常规退火方式,在Pt/Ti/SiO2/Si衬底上能成功制备出具有钙钛矿结构的、晶粒粒径约80 nm、厚约850 nm的梯度BST薄膜。该BST梯度薄膜在常温下介电常数达526,介电损耗约为0.06,矫顽场强约为100 kV/cm,剩余极化强度约为10μC/cm2,饱和极化强度约为20μC/cm2,在各个领域都具有广阔的应用前景。In this paper, the preparation of （Ba1-xSrx）TiO3 thin films by liquid source chemical deposition （LSMCD） was presented. The proportion of chemical elements and the concentration of dopant could be controlled exactly by this method. The thickness of thin films and the diameter of crystal particle were controlled by the duration and times of super sonic misted deposition. X-ray diffraction（XRD） and scanning electron microscopy（SEM） showed that BST thin films with perovskite phase were prepared on Pt/Ti/SiO2/Si substrates by conventional fur nace annealing（RCA） after depositing 8 times,whose diameter of crystal particle and thickness were about 52580 nm and 850 nm, respectively. The electric hysteresis loop showed that the coercive field, remanent polarization and spontaneous polarization of BST thin films were 100 kV/cm, 10 μC/cm^2. Those electric parameters showed that the gradient BST thin film prepared in this paper had a widely applied foreground.

关 键 词：液态源雾化沉积 钛酸锶钡 梯度薄膜 钙钛矿相 

分 类 号：TN304[电子电信—物理电子学]