石墨靶电流对类石墨镀层摩擦性能的影响  

Influence of graphite target currents on tribological properties of graphite-like carbon coating

作　　者：严少平[1] 蒋百灵[1] 段冰[1] 

机构地区：[1]西安理工大学材料科学与工程学院

出　　处：《材料热处理学报》2007年第6期123-127,共5页Transactions of Materials and Heat Treatment

基　　金：国家"863"科技攻关项目(2005AA33H010);陕西省教育厅专项科研基金项目(05JK274)

摘　　要：用非平衡磁控溅射离子镀技术制备含铬类石墨镀层,研究了石墨靶电流对磁控溅射法制备类石墨镀层摩擦性能的影响。通过扫描电镜、原子力显微镜、透射电镜等分析了镀层的表面形貌与组织。结果表明:所制备镀层的硬度随着石墨靶电流的升高而增加;镀层的摩擦系数和比磨损率随靶电流的增大呈现先降后升的趋势;扫描电镜和原子力显微镜图片分析表明镀层表面呈典型的岛团状聚集态,且随着石墨靶电流增大,镀层表面岛团状尺寸变大、镀层表面粗糙度随之增大。用高分辨透射电镜分析显示:靶电流较小时碳层中出现Cr元素富集区,随着石墨靶电流的增大,表面层中的Cr弥散分布。Graphite-like carbon coatings doped with chromium were deposited by unbalanced magnetron sputter ion plating technique. The effects of graphite target currents on microstructure and tribological properties of the coating were studied by SEM, AFM and TEM. The results show that higher graphite target current is favourable to get higher microhardness of the coating, while friction coefficient and specific wear rate of the coating decreases first and then increases with increasing graphite target current. SEM and AFM analysis demonstrates a typical island cluster structure of the coating surface. With the increase of graphite target current, clusters of the coating surface become larger and higher and the surface roughness increases. Cr-riched zones on the coating surface are observed for lower target current and Cr gradually disperses into the carbon layer with the increase of graphite target current.

关 键 词：非平衡磁控溅射 类石墨镀层 靶电流 摩擦性能 

分 类 号：TH117.1[机械工程—机械设计及理论] O484.5[理学—固体物理]