柔性衬底上WO_x薄膜的制备及特性研究  

Preparation and characteristic properties of WO_x thin films on polyethylene terephthalates soft substrate

作　　者：李海霞[1] 唐武[1] 翁小龙[1] 邓龙江[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室教育部隐身材料与技术工程中心,四川成都610054

出　　处：《功能材料》2007年第12期1962-1964,1967,共4页Journal of Functional Materials

基　　金：国家自然科学基金资助项目(50601005)

摘　　要：采用射频磁控溅射工艺,在柔性PET衬底上低温制备电致变色WOx/ITO/PET多层薄膜。利用X射线衍射(XRD)、扫描电子显微镜(SEM)、X射线光电子能谱(XPS)分析所制备薄膜的原始态、着色态和退色态的微观结构、表面形貌及W元素的化合价态。结果表明:原始态、着色态及退色态的WOx薄膜均为非晶态;原始态薄膜表面存在较多孔洞,薄膜在LiClO4的乙腈溶液中进行电致变色反应,实验发现着退色态薄膜颜色可发生可逆变化,随Li+的注入和抽出,薄膜表面形貌发生明显变化;XPS分析进一步表明WOx薄膜在原始态中W元素的化合价为W6+,着色态存在W6+和W5+的混合价态。WOx/ITO films were deposited on polyethylene terephthalates （PET） soft substrate by RF magnetron sputtering. The microstructure, surface morphology and surface chemical state of WO, films were analyzed by X-ray diffraction （XRD）, SEM and XPS, respectively. It can be found that the WO, films are amorphous both in colored and bleached state as well as in original state. It was also found that the reversible color change during electrochromic action in the solution of LiClO4-acetonitrile. There are many pores in original state, the different surface morphology are discussed in terms of the injection and extraction of Li＋ in reaction proceeding. The XPS analysis revealed that W element exhibit W^6＋ in original state and both W^6＋ and W^5＋ in the colored state.

关 键 词：WOx薄膜 电致变色 磁控溅射 

分 类 号：O484.4[理学—固体物理]