长春光机所软X射线-极紫外波段光学研究(英文)  

Soft X-ray and extreme ultraviolet optics in CIOMP

作　　者：陈波[1] 尼启良[1] 王君林[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130033

出　　处：《光学精密工程》2007年第12期1862-1868,共7页Optics and Precision Engineering

基　　金：Supported by the National Natural Science Foundation of China(No 40774098,No 60677043

摘　　要：综述了我所软X射线-极紫外波段关键技术的研究进展。描述了软X射线-极紫外波段光源技术,研制了工作波段为6 ～22 nm的微流靶激光等离子体光源;介绍了光子计数成像探测器技术,研制出了有效直径为25 mm,等效像元分辨率为0 .3 mm的极紫外波段探测器;开展了超光滑表面加工、检测技术的研究,研制了超光滑表面抛光机,加工出高面形精度的超光滑表面,面形精度为6 nm(RMS值) ,表面粗糙度达0 .6 nm(RMS值) ;进行了软X射线-极紫外波段多层膜技术的研究,研制出13 nm处反射率为60 %的多层膜反射镜,150 mm口径反射镜的反射率均匀性优于±2 .5 %;最后,讨论了软X射线-极紫外波段测量技术研究,研制出该波段反射率计,其测量范围为5 ～50 nm,光谱分辨率好于0 .2 nm,测量重复性好于±1 %。在上述关键技术研究基础上,研制出了极紫外波段成像仪和空间极紫外波段太阳望远镜,这些仪器在我国空间科学研究项目中发挥了作用。Some key technologies on soft X-ray and Extreme Ultraviolet （EUV） optics developed at CIOMP are reviewed in this paper. The technology for laser-produced plasma sources is described and a laser-produced plasma source with a liquid target worked at wavelength range of 6-22 nm has been developed, Soft X-ray and EUV photon-counting imaging is introduced and a two-dimensional photoncounting detector with position sensitive anode is fabricated. The active area of the detector is 25 mm in diameter and the resolution is 0.3 mm. The technology of super-smooth mirror fabrication is studied and a polishing machine has been developed to fabricate the super-smooth surface mirrors with the roughness and the figure of 0.6 nm （RMS） and 6 nm （RMS） ,respectively. Soft X-ray and EUV multilayer film technologies are coverd also in the paper and a number of mutilayer coating mirrors have been deposited for some space science projects. These muhilayer mirrors show their reflectivity of 60% at 13 nm and the uniformity better than ±2.5% across a 150 mm diameter. The soft X-ray and EUV radiometric technologies are studied and a reflectometer, with operational wavelength range of 5 -50 nm, spectrum resolution of 0.2 nm and repeatability better than 1% has been set up. Based on acutting-edge technology, an EUV imager and a space EUV solar telescope are developed, these imaging instruments have played an important role in a number of scientific projects.

关 键 词：空间光学 软X射线 极紫外 

分 类 号：O434.1[机械工程—光学工程] O434.2[理学—光学]