微柔性铰链转动能力和精度特性研究  

Study on the Rotation Capacity and the Precision of Micro Flexible Hinges

作　　者：邱丽芳[1] 南铁玲[1] 柳林[1] 

机构地区：[1]北京科技大学机械工程学院,北京100083

出　　处：《微纳电子技术》2007年第12期1068-1072,共5页Micronanoelectronic Technology

基　　金：教育部科学技术研究重点项目资助(106018)

摘　　要：对柔性铰链的转动能力和精度特性等方面进行了理论分析和研究,给出了柔性铰链的柔度矩阵和精度特性矩阵的计算公式,得到表示柔性铰链转动能力的变形量方程和表示精度特性的位移方程。用VC++实现了相应的参数化程序。提出了铰链内各柔度间的比值概念,为定量地比较柔性铰链的性能提供了依据。并给出了两种MEMS柔性铰链的分析实例。The theoretical study on the rotation capacity and the precision of flexible hinges was given. Complitational formulas of flexibility and precision matrix of flexible hinges were presented, with the deformation vector and displacement equations of the rotation capacity obtained. The corresponding parameterized program is deduced with VC＋＋. The internal flexibility ratio, a new concept, was brought forward to compare the performances of flexible hinges quantitatively. Two flexible hinges, rectangle hinge and semi-lunar hinge, were analyzed as example.

关 键 词：柔性铰链 转动能力 精度特性 柔度比 

分 类 号：TH703[机械工程—仪器科学与技术] O312[机械工程—精密仪器及机械]