非制冷微测辐射热计的热学设计与分析  

Thermal design and analyse of an uncooled microbolometer

作　　者：马铁英[1] 李铁[1] 王跃林[1] 

机构地区：[1]中国科学院微系统与信息技术研究所传感技术国家重点实验室

出　　处：《红外与激光工程》2007年第6期920-923,共4页Infrared and Laser Engineering

基　　金：上海A-M基金资助项目(0402);973课题"基于碳纳米管敏感结构与传感器"资助项目(2006CB300406)

摘　　要：电压灵敏度和热时间常数为表征微测辐射热计热性能的两个重要参数,热绝缘结构尺寸是决定性能参数的首要因素。首先采用解析法计算,并分析了这两个性能参数随结构尺寸改变的规律,确定一组能兼顾电压灵敏度及热时间常数的结构尺寸优化值,再利用有限元分析法对此优化结果加以模拟和验证,为下一步微测辐射热计的研制提供了可靠的理论依据。Voltage sensitivity and thermal time constant are the importatnt parameters to describe the performance of an bolometer, and the size of thermal insulative structure is the initial factor to determine them. Based on the analytic method, the relationships of the two parameters varying with the structure size are analyzed and optimized to have a trade-off between the volatge sensitivity and thermal time constant. The performances are then conftrmed by the simulation of Fim＇te Element Method with ANSYS 8.0. These results provide reliable theory for the further investigation on the micro-bolometer device.

关 键 词：微测辐射热计 电压灵敏度 热时间常数 热学设计 

分 类 号：TN21[电子电信—物理电子学]