半导体行业挥发性有机物(VOCs)排放特征研究  

Study on the Emission of Volatile Organic Compounds (VOCs) from Semiconductor Manufacture Industry

作　　者：徐捷[1] 魏海萍[1] 修光利[2] 伏晴艳[1] 吴迓名[1] 李炎[1] 王歆文[1] 

机构地区：[1]上海市环境监测中心,上海200030 [2]华东理工大学,上海200237

出　　处：《环境科学与管理》2007年第10期37-41,44,共6页Environmental Science and Management

摘　　要：采用工艺调查与现场监测相结合的方法,研究了半导体行业废气排放中VOCs的种类和排放水平。结果表明,共检测出26种有机物,其中以异丙醇排放量最大。采用排放系数法估算了该行业VOCs2004年的排放量和2010年的预期排放量,并提出了加强和完善排放标准控制以及清洁生产等控制措施的建议。Combining process investigation with field monitoring,the constitutes and concentration level of VOCs released from typical semiconductor manufacture factories in Shanghai were studied in this paper.Results indicated that 26 volatile organic compounds were observed and the emission rate of IPA（isopropyl alcohol） was the largest.The emission amounts of VOCs in 2004 and anticipative emission amount in 2010 from semiconductor manufacturers was estimated by emission factor method.And some suggestions including improvement of emission standard and promotion of cleaner production are provided and discussed.

关 键 词：挥发性有机物(VOCs) 半导体制造 排放速率 

分 类 号：X515[环境科学与工程—环境工程]