用IR研究H^+辐照对Mo涂层的影响  

IR study of H^+ irradiation effect on the molybdenum film

作　　者：刘春海[1] 杜晓松[2] 汪德志[1] 黄宁康[1] 杨斌[1] 

机构地区：[1]四川大学原子核科学技术研究所教育部辐射物理及技术重点实验室,成都610064 [2]电子科技大学光电信息学院,成都610054

出　　处：《原子与分子物理学报》2007年第6期1142-1146,共5页Journal of Atomic and Molecular Physics

基　　金：国家自然科学基金(59781002)

摘　　要：在不锈钢基体上采用离子束混合技术及电子束处理方法进行Mo薄膜沉积,沉积后的试样再进行氢离子注入.分别对氢离子注入前后的样品进行500~4000波数范围内IR分析,研究了氢离子辐照前后涂层的红外光谱振动吸收峰的变化,对Mo涂层的抗氢机理进行了探讨.Mo films deposited by ion beam mixing and electron beam treatment on the stainless steel were irradiated with a hydrogen ion beam. Infrared transmission measurement was selected to analyze Mo films before and after hydrogen ion irradiation in the range between 500 and 4000 cm^-1. By Infrared transmission measurement, we study changes of infrared spectra absorbing peaks of Mo films before and after hydrogen ion irradiation, and discussed mechanism of hydrogen resistance by Mo films.

关 键 词：MO薄膜 离子束混合 电子束处理 IR H^+ 辐照 

分 类 号：O484.5[理学—固体物理]