Ipsu薄膜体声波器件及其在通信系统中的应用  

Thin film bulk acoustic wave devices and their applications in telecommunication systems

作　　者：吴勇[1] 吴孟强[1] 蒋松涛[1] 钟朝位[1] 张树人[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《四川大学学报（自然科学版）》2007年第6期1235-1238,共4页Journal of Sichuan University(Natural Science Edition)

基　　金：四川省青年基金(JS0303001)

摘　　要：薄膜体声波谐振器(FBAR)采用一种先进的谐振技术,它是通过压电薄膜的逆压电效应将电能量转换成声波而形成谐振,这一谐振技术可以用来制作薄膜频率整形器件等先进元器件.本文系统介绍了FBAR的结构、工作原理及其在现代通信系统中的应用.A Film Bulk Acoustic Resonators （FBARs） is a breakthrough resonator technology based on a reverse piezoelectric effect that occurs when an electric signal applies on a piezoelectric thin film, transforms to an acoustic wave, and accordingly forms resonation. This technology can be employed to create advanced frequency shaping components and devices including filters, duplexers, and resonators for oscillators. The structures, the working mechanisms of FBARs are introduced in this paper, and their applications into modern telecommunication systems are also reviewed.

关 键 词：FBAR 谐振器 振荡器 滤波器 双工器 

分 类 号：TN911[电子电信—通信与信息系统]