基于采样定理的白光干涉SEST算法研究  

White-light interferometric SEST algorithm based on sampling theory

作　　者：冯奎景[1] 廖广兰[1] 史铁林[1] 王海珊[1] 

机构地区：[1]华中科技大学机械科学与工程学院

出　　处：《计算机工程与应用》2008年第1期79-81,共3页Computer Engineering and Applications

基　　金：国家重点基础研究发展规划(973)(the National Grand Fundamental Research973Program of China under Grant No.2003CB716207);国家自然科学基金(the National Natural Science Foundation of China under Grant No.50405033);国家高技术研究发展计划(863)(the Na-tional High-Tech Research and Development Plan of China under Grant No.20060104Z3055)。

摘　　要：研究了基于采样定理的白光干涉测量算法——Square-envelop function Estimation by Sampling Theory(SEST)算法,该算法采样间隔是传统算法的数倍,最大可达1.425"m,大大提高了测量速度。在该算法基础上,提出应用循环缓冲器来定位相干区间,减少了存储的采样值及计算量,提高了数据处理速度。仿真结果表明,该算法是快速、有效的。An white-light interferometric algorithm,Square-envelop function Estimation by Sampling Theory （SEST） algorithm, based on sampling theory is introduced.The algorithm extends the sampling interval to 1.425 μm,which is several times wider than those used in conventional algorithm.On the basis of the algorithm,a circular buffer is proposed to locate the interference region in order to reduce the sampling data and the computational cost then increase the data processing speed.Simulation results show that the algorithm is fast and effective.

关 键 词：光学测量 SEST算法 白光干涉 表面形貌 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置] TN247[自动化与计算机技术—控制科学与工程]