近红外光谱仪新进展  

New progress of near infrared spectrometer.

作　　者：褚小立[1] 陆婉珍[1] 

机构地区：[1]石油化工科学研究院,北京100083

出　　处：《分析仪器》2008年第1期3-7,共5页Analytical Instrumentation

基　　金：中国石化股份公司科研项目(104118)

摘　　要：近几年国际上出现了一些新型近红外光谱仪器。这些仪器大都是基于微机电系统(MEMS)技术设计和制造的,如MEMS法布里-珀罗干涉仪、MEMS可编程衍射光栅、MEMS扫描光栅等,具有重量轻、体积小、探测速度快、可批量制造以及成本低廉等特点。本文介绍这些新型近红外光谱仪器的基本原理和主要技术指标。In recent years, several new types of near infrared spectrometer have emerged. Most of them are designed and fabricated by the application of microelectro-mechanical system （MEMS） technologies, such as MEMS Fabry-Perot interferometer, MEMS programmable diffraction grating and MEMS scanning grating. These instruments have the characteristics of low weight, small volume and rapid analysis, and can be manufactured in batches. In this paper, the basic principles and main technical specifications of these instruments are introduced.

关 键 词：近红外光谱仪 微机电系统 编码盘 法布里-珀罗干涉仪 可编程衍射光栅 扫描光栅 

分 类 号：TH744.1[机械工程—光学工程]