一种测量硬质薄膜残余应力的新方法  

A NOVEL METHOD FOR DETERMINING RESIDUAL STRESSES OF HARD COATINGS

作　　者：赵升升[1] 华伟刚[1] 杜昊[1] 宫骏[1] 孙超[1] 李家宝[1] 

机构地区：[1]中国科学院金属研究所,沈阳110016

出　　处：《金属学报》2008年第1期125-128,共4页Acta Metallurgica Sinica

基　　金：国家自然科学基金50471072~~

摘　　要：提出了一种测量硬质薄膜残余应力的新方法——剥层曲率半径法,并设计了一套光杠杆系统,可以精确测量镀膜样品因薄膜存在残余应力而造成试片弯曲的曲率半径,从而计算出薄膜的残余应力.通过对仪器测量误差的考察和电弧离子镀(Ti,Al)N薄膜残余应力的测定,证明了该方法的有效性.A new method--stripping layer-substrate curvature was put forward to determine the residual stresses of hard coatings. A set of optical lever system was designed to measure accurately the curvature of the sample bended by the stresses of the films, and then the residual stresses can be calculated. Through detecting the error of the measuring equipment and testing the residual stresses in （Ti, Al）N films deposited using arc ion plating, the effectiveness of the method was proved.

关 键 词：硬质薄膜 残余应力 测量方法 剥层曲率半径法 

分 类 号：TG115.222[金属学及工艺—物理冶金]