ZnO：Ag薄膜的结构对其紫外发光增强的研究  

Effect of the structures on the enhancement of ultra-violet photoluminescence intensity in Ag doped ZnO film

作　　者：金运姜[1] 余庆选[1] 刘书见[1] 廖源[1] 

机构地区：[1]中国科学技术大学物理系,安徽合肥230026

出　　处：《量子电子学报》2008年第1期43-48,共6页Chinese Journal of Quantum Electronics

基　　金：安徽省自然科学基金(070414183)

摘　　要：利用脉冲激光沉积方法(PLD),在Si(100)衬底上生长了银掺杂的氧化锌薄膜(ZnO:Ag),所用的激光波长分别是1064 nm和355 nm。通过X射线衍射分析发现,两种不同激光沉积样品的晶体结构有很大的区别。此外,由1064 nm激光制备的ZnO:Ag薄膜,在氧气中800℃的条件下退火一个小时后,在其光致发光(PL)谱中发现,样品的紫外发光峰强度随薄膜中Ag含量增加而急剧增强,但在同样条件下处理的由355 nm激光制备的薄膜,没有观察到类似现象。经过分析和比较,我们认为这种紫外发光增强的特殊现象,是ZnO:Ag薄膜中的纳米Ag颗粒所引起的局部等离子共振而导致。Different Ag-doped ZnO and pure ZnO films on Si （100） substrates were prepared by PLD （the laser wavelengths are 1064 nm and 355 nm, respectively）. The X-ray diffraction measurement indicated that the samples made by the two laser wavelengths have quite different structures. An intense enhancement of UV intensity was observed in the Ag-doped ZnO films prepared by the laser wavelength of 1064 nm after being annealed at 800℃ in oxygen, but the similar phenomenon was not detected in the Ag-doped ZnO films tnade by the wavelength of 355 nm after the same annealing treatment. Under detailed discussion and comparison between the structural and optical properties of Ag-doped ZnO films, it was concluded that the reason of the enhancement of UV intensity may be related to the localized surface plasmon resonance resulting from the nanoscale silver particles embedded in the Ag-doped ZnO films.

关 键 词：薄膜光学 氧化锌 光致发光 局部等离子共振 

分 类 号：O484.4[理学—固体物理]